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Hien Nguyen
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Publications (1)
Proceedings Article | 1 May 2023 Presentation + Paper
Characterization of TSV etch from a sustainability standpoint
Osakpolo Isowamwen, Nathan Marchack, Devi Koty, Qingyun Yang, Hien Nguyen, Steve Molis, Scott Lefevre, Marco Hopstaken, Andy Metz, Jeff Shearer, Robert Bruce
Proceedings Volume 12499, 124990H (2023) https://doi.org/10.1117/12.2658564
KEYWORDS: Etching, Passivation, Ions, Sustainability, Plasma etching, Scanning electron microscopy, Semiconductors, Semiconductor manufacturing, Semiconducting wafers, Plasma
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