Dr. Hongwen Sun Profile

Dr. Hongwen Sun

at Hohai Univ

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Publications (2)

SPIE Journal Paper | 1 July 2010

Focused ion beam-based nanoimprint stamp for replicating micro/nanostructures under low temperature

Hongwen Sun, Guogao Liu, Shanming Lin, Jingquan Liu, Di Chen

JM3, Vol. 9, Issue 03, 033005, (July 2010) https://doi.org/10.1117/12.10.1117/1.3469818

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Proceedings Article | 21 August 2009 Paper

Nanoimprint lithography for complex 3D micro-nano structures replication under low temperature

Hongwen Sun, Jingquan Liu, Di Chen

Proceedings Volume 7402, 74020U (2009) https://doi.org/10.1117/12.820583

KEYWORDS: Nanoimprint lithography, Atomic force microscopy, Polymers, Etching, Ion beams, Nanolithography, Electron beam lithography, Silicon, Optical lithography, Electron microscopes

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