Dr. Igor Bragin Profile

Dr. Igor Bragin

at Coherent LaserSystems GmbH & Co KG

SPIE Involvement:

Author

Publications (23)

Proceedings Article | 17 February 2017 Presentation + Paper

Power and pulse energy scaling for high-volume UV-laser microprocessing

Ralph Delmdahl, Oliver Haupt, Igor Bragin, Hans-Stephan Albrecht

Proceedings Volume 10092, 1009215 (2017) https://doi.org/10.1117/12.2256018

KEYWORDS: Excimer lasers, Ultraviolet radiation, High power lasers, Laser processing, Pulsed laser operation, Laser systems engineering, Laser applications, Semiconducting wafers, Capacitors, Manufacturing

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Proceedings Article | 22 April 2009 Paper

Advances in industrial high-power excimer laser technology

Igor Bragin, Timur Misyuryaev, Andreas Targsdorf, Ingo Klaft, Ludolf Herbst, Wolfgang Zschocke, Kai Schmidt

Proceedings Volume 7131, 71311B (2009) https://doi.org/10.1117/12.816554

KEYWORDS: Pulsed laser operation, Gas lasers, Excimer lasers, Laser applications, Laser stabilization, High power lasers, Laser development, Pulsed power, Laser systems engineering, Laser energy

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Proceedings Article | 20 March 2007 Paper

New high repetition rate, high energy 308 nm excimer laser for material processing

Ludolf Herbst, Ingo Klaft, Kai Schmidt, Igor Bragin, Hans-Stephan Albrecht

Proceedings Volume 6459, 64590I (2007) https://doi.org/10.1117/12.717842

KEYWORDS: Excimer lasers, Pulsed laser operation, Laser development, Gas lasers, Laser stabilization, High power lasers, Materials processing, Excimers, Laser ablation, Ultraviolet radiation

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Proceedings Article | 28 May 2004 Paper

Sub-0.25-pm 50-W amplified excimer laser system for 193-nm lithography

Sergei Govorkov, Alexander Wiessner, Gongxue Hua, Timur Misuryaev, Andrey Knysh, Stefan Spratte, Peter Lokai, Tamas Nagy, Igor Bragin, Andreas Targsdorf, Thomas Schroeder, Hans-Stephan Albrecht, Rainer Desor, Thomas Schmidt, Rainer Paetzel

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536374

KEYWORDS: Oscillators, Optical amplifiers, Excimer lasers, Laser systems engineering, Lithography, Molybdenum, Amplifiers, Optical lithography, Optics manufacturing, Pulsed laser operation

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Proceedings Article | 10 November 2003 Paper

F2-laser systems prepared for advanced applications at 157 nm

R. Delmdahl, K. Mannel, S. Spratte, U. Rebhan, S. Govorkov, K. Vogler, I. Bragin

Proceedings Volume 5120, (2003) https://doi.org/10.1117/12.515515

KEYWORDS: Fluorine, Quartz, Laser applications, Optical lithography, Lithography, Polymers, Excimer lasers, Silica, Micromachining, Telecommunications

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Proceedings Article | 26 June 2003 Paper

High-power excimer lasers for 157-nm lithography

Stefan Spratte, Frank Voss, Igor Bragin, Elko Bergmann, Norbert Niemoeller, Tamas Nagy, Ulrich Rebhan, Andreas Targsdorf, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485345

KEYWORDS: Lithography, Pulsed laser operation, Laser stabilization, High power lasers, Reliability, Laser development, Excimer lasers, Laser resonators, Optical lithography, Laser optics

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Proceedings Article | 26 June 2003 Paper

Excimer lasers for superhigh NA 193-nm lithography

Rainer Paetzel, Hans Albrecht, Peter Lokai, Wolfgang Zschocke, Thomas Schmidt, Igor Bragin, Thomas Schroeder, Christian Reusch, Stefan Spratte

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485344

KEYWORDS: Laser stabilization, Laser optics, Excimer lasers, Optical lithography, Pulsed laser operation, Signal detection, Calibration, Oscillators, Optical components, Laser development

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Proceedings Article | 30 July 2002 Paper

High-power high-repetition-rate F2 lasers for 157-nm lithography

Klaus Vogler, Ingo Klaft, Frank Voss, Igor Bragin, Elko Bergmann, Tamas Nagy, Norbert Niemoeller, Stefan Spratte, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474614

KEYWORDS: Lithography, Laser stabilization, Prototyping, Pulsed laser operation, Vacuum ultraviolet, High power lasers, Laser development, Spatial coherence, Laser metrology, Polarization

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Proceedings Article | 30 July 2002 Paper

High-repetition-rate excimer lasers for 193-nm lithography

Wolfgang Zschocke, Hans Stephen Albrecht, Thomas Schroeder, Igor Bragin, Peter Lokai, Farid Seddighi, Christian Reusch, Anna Cortona, Kai Schmidt, Rainer Paetzel, Klaus Vogler

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474561

KEYWORDS: Laser development, Laser stabilization, Pulsed laser operation, 193nm lithography, Lithography, Excimer lasers, Semiconducting wafers, Laser scanners, 3D scanning, Optical design

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Proceedings Article | 14 September 2001 Paper

Advanced F2-lasers for 157-nm lithography

Klaus Vogler, Ingo Klaft, Frank Voss, Igor Bragin, Elko Bergmann, Tamas Nagy, Norbert Niemoeller, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435652

KEYWORDS: Calibration, Lithography, Laser stabilization, Spectroscopy, Vacuum ultraviolet, Pulsed laser operation, Laser metrology, Laser scanners, 3D scanning, Gas lasers

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Proceedings Article | 14 September 2001 Paper

High-power 193-nm excimer lasers for DUV lithography

Rainer Paetzel, Klaus Vogler, Hans Stephen Albrecht, Thomas Schroeder, Igor Bragin, Juergen Kleinschmidt, Wolfgang Zschocke

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435755

KEYWORDS: Laser stabilization, Excimer lasers, Lithography, Pulsed laser operation, Laser scanners, 3D scanning, Lenses, High power lasers, Laser energy, Laser development

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Proceedings Article | 5 July 2000 Paper

Prospects for very high repetition rate lasers for microlithography

Igor Bragin, Vadim Berger, Rainer Paetzel, Uwe Stamm, Andreas Targsdorf, Juergen Kleinschmidt, Dirk Basting

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389003

KEYWORDS: Pulsed laser operation, Laser stabilization, Lithography, Pulsed power, Optical lithography, Deep ultraviolet, Electrodes, Excimer lasers, Gas lasers, Laser development

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Proceedings Article | 5 July 2000 Paper

High-repetition-rate ultranarrow-bandwidth 193-nm excimer lasers for DUV lithography

Uwe Stamm, Rainer Paetzel, Igor Bragin, Juergen Kleinschmidt, Peter Lokai, Rustem Osmanov, Thomas Schroeder, Martin Sprenger, Wolfgang Zschocke

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388976

KEYWORDS: Excimer lasers, Lithography, Calibration, Pulsed laser operation, Laser development, Spectroscopy, Laser stabilization, Laser scanners, 3D scanning, Scanners

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Proceedings Article | 5 July 2000 Paper

Advanced F2 lasers for microlithography

Klaus Vogler, Uwe Stamm, Igor Bragin, Frank Voss, Sergei Govorkov, Gongxue Hua, Juergen Kleinschmidt, Rainer Paetzel

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388991

KEYWORDS: Lithography, Laser stabilization, Sensors, Calibration, Metrology, Power meters, Pulsed laser operation, Laser resonators, Optical lithography, Laser metrology

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Proceedings Article | 5 July 2000 Paper

Ultranarrow-bandwidth excimer lasers for 248-nm DUV lithography

Rainer Paetzel, Hans Stephen Albrecht, Vadim Berger, Igor Bragin, Matthias Kramer, Juergen Kleinschmidt, Marcus Serwazi

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388985

KEYWORDS: Excimer lasers, Laser resonators, Laser stabilization, Resonators, Deep ultraviolet, Polarization, Lithography, Laser scanners, 3D scanning, Laser development

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Proceedings Article | 26 July 1999 Paper

High-repetition-rate excimer lasers for DUV lithography

Uwe Stamm, Rainer Paetzel, Igor Bragin, Vincent Berger, Ingo Klaft, Juergen Kleinschmidt, Rustem Osmanov, Thomas Schroeder, Klaus Vogler, Wolfgang Zschocke, Dirk Basting

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354310

KEYWORDS: Excimer lasers, Lithography, Laser stabilization, Deep ultraviolet, Semiconducting wafers, Combined lens-mirror systems, Optical lithography, Reliability, Pulsed laser operation, Laser resonators

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Proceedings Article | 25 June 1999 Paper

Excimer laser for 157-nm lithography

Uwe Stamm, Igor Bragin, Sergei Govorkov, Juergen Kleinschmidt, Rainer Paetzel, Evgueni Slobodtchikov, Klaus Vogler, Frank Vofl, Dirk Basting

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351152

KEYWORDS: Excimer lasers, Lithography, Laser resonators, Laser stabilization, Optical lithography, Deep ultraviolet, Laser applications, Vacuum ultraviolet, Resonators, Optical design

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Proceedings Article | 22 December 1998 Paper

High-average-power excimer lasers

Vladimir Borisov, Andrei Demin, Oleg Khristoforov, Yurii Kirykhin, Aleksandr Vinokhodov, V. Vodchits, Dirk Basting, Uwe Stamm, Frank Voss, Igor Bragin

Proceedings Volume 3574, (1998) https://doi.org/10.1117/12.334492

KEYWORDS: Pulsed laser operation, Excimer lasers, Electrodes, Gas lasers, Ultraviolet radiation, Fluctuations and noise, Laser applications, Laser development, Inductance, Energy efficiency

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Proceedings Article | 29 June 1998 Paper

ArF excimer laser for 193-nm lithography

Uwe Stamm, Rainer Paetzel, Juergen Kleinschmidt, Klaus Vogler, Wolfgang Zschocke, Igor Bragin, Dirk Basting

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310730

KEYWORDS: Excimer lasers, Lithography, Laser stabilization, Pulsed laser operation, Silica, Optical lithography, Laser applications, Laser development, Laser resonators, Laser scanners

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Proceedings Article | 7 July 1997 Paper

ArF excimer laser for 193-nm lithography

Uwe Stamm, Juergen Kleinschmidt, Peter Heist, Igor Bragin, Rainer Paetzel, Dirk Basting

Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.276007

KEYWORDS: Excimer lasers, Lithography, Laser development, Light sources, Optical lithography, Scanners, Combined lens-mirror systems, Imaging systems, High power lasers, Laser stabilization

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Proceedings Article | 4 April 1997 Paper

Recent developments in industrial excimer laser technology

Uwe Stamm, Rainer Paetzel, Igor Bragin, Juergen Kleinschmidt, Frank Voss, Dirk Basting

Proceedings Volume 3092, (1997) https://doi.org/10.1117/12.270114

KEYWORDS: Laser applications, Excimer lasers, Laser stabilization, Lithography, High power lasers, Fluorine, Laser marking, Micromachining, Laser development, Resonators

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Proceedings Article | 31 March 1997 Paper

Excimer lasers for material ablation cross the 1.5 kHz mark

Rainer Paetzel, Uwe Stamm, Igor Bragin, Frank Voss, Bernard Nikolaus, Heinrich Endert, Dirk Basting

Proceedings Volume 2992, (1997) https://doi.org/10.1117/12.270082

KEYWORDS: Excimer lasers, Pulsed laser operation, Laser applications, Laser ablation, Solid state lasers, Switches, Solid state electronics, Magnetism, Laser development, Micromachining

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Proceedings Article | 29 March 1996 Paper

Recent results on long-life 1-kHz excimer laser development

Ulrich Rebhan, Igor Bragin, Frank Voss, Uwe Stamm

Proceedings Volume 2702, (1996) https://doi.org/10.1117/12.236881

KEYWORDS: Pulsed laser operation, Excimer lasers, Laser applications, Laser development, Laser stabilization, Laser sources, Power supplies, Laser energy, Electrodes, Gas lasers

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Showing 5 of 23 publications

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