Dr. Jae Yeol Maeng Profile

Dr. Jae Yeol Maeng

at GLOBALFOUNDRIES Singapore Pte Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 March 2018 Presentation + Paper

Ao Chen, Yee Mei Foong, Jae Yeol Maeng, Nikhil Jain, Steve McDermott

Proceedings Volume 10587, 105870J (2018) https://doi.org/10.1117/12.2297376

KEYWORDS: Source mask optimization, Calibration, Lithography, Critical dimension metrology

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Keywords/Phrases