Dr. Jiantao Wang Profile

Dr. Jiantao Wang

at Shanghai Huali Integrated Circuit Corp

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Publications (2)

Proceedings Article | 10 December 2024 Paper

Study on interaction between bottom SiARC and photoresist

Xianguo Dong, Qin Yuan, Baotong Chen, Jiantao Wang, Shirui Yu, Yu Zhang

Proceedings Volume 13423, 134231C (2024) https://doi.org/10.1117/12.3053124

KEYWORDS: Photoresist materials, Interfaces, Capillaries, Windows, Switches, Reflection, Lithography, Liquids, Integrated circuits, Adhesion

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Lithography PR profile improvement and defects reduction by film pre-treatment

Jiantao Wang, Song Gao, Shuo Liu, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang

Proceedings Volume 11611, 1161134 (2021) https://doi.org/10.1117/12.2583833

KEYWORDS: Lithography, Reflectivity, Scanning electron microscopy, Silicon, Photoresist materials, Line width roughness, Semiconducting wafers, Etching, Coating

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