Dr. Jie Ma Profile

Dr. Jie Ma

at Institute of Microelectronics

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Publications (3)

Proceedings Article | 12 January 2009 Paper

Fabrication of transmission gratings for extreme ultraviolet interference lithography

Jie Ma, Xiaoli Zhu, Weizhong Zhu, Changqing Xie, Tianchun Ye, Peixiong Shi

Proceedings Volume 7133, 713336 (2009) https://doi.org/10.1117/12.810640

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Proceedings Article | 4 January 2008 Paper

Fabrication of 200 nm period x-ray transmission gratings using electron beam lithography

Xiaoli Zhu, Changqing Xie, Tianchun Ye, Min Zhao, Jie Ma, Ji Jiang, Jiebin Niu, Ming Liu

Proceedings Volume 6832, 68320V (2008) https://doi.org/10.1117/12.758100

KEYWORDS: X-ray lithography, X-rays, Electron beam lithography, Gold, Electroplating, Polymethylmethacrylate, Photomasks, Silicon, X-ray telescopes, Photoresist processing

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Proceedings Article | 21 November 2007 Paper

Analysis of the resolution doubling technique of high-resolution gratings by x-ray lithography

Jie Ma, Xiaoli Zhu, Changqing Xie, Ming Liu, Min Zhao, Ji Jiang

Proceedings Volume 6827, 68272A (2007) https://doi.org/10.1117/12.757819

KEYWORDS: Photomasks, X-ray lithography, Semiconducting wafers, X-rays, Gold, Beam propagation method, Optical design, Wave propagation, Light wave propagation, Lithography

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