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Jie Zhou
at Shanghai Univ
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Publications (1)
Proceedings Article | 19 September 2013 Paper
Research of boron films deposited on different substrates
Jie Zhou, Linjun Wang, Jian Huang, Ke Tang, Bing Ren, Beiling Yao, Yiben Xia
Proceedings Volume 8905, 89050Q (2013) https://doi.org/10.1117/12.2033053
KEYWORDS: Boron, Silicon, Diamond, Sputter deposition, Silicon films, Glasses, Chemical vapor deposition, Sensors, Particles, Oxygen
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