Dr. John B. Warren Profile

Dr. John B. Warren

Staff Scientist at Brookhaven National Lab

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Publications (1)

SPIE Journal Paper | 1 October 2009

Elemental analysis of nanoparticles via electron beam lithography of patterned arrays on silicon-nitride membranes

John Warren

JNP, Vol. 3, Issue 01, 031990, (October 2009) https://doi.org/10.1117/12.10.1117/1.3266495

KEYWORDS: Silicon, Nickel, X-rays, Nanoparticles, Particles, Electron beam lithography, Scanning electron microscopy, Metals, Semiconducting wafers, Metrology

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