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Jongsok Yi
at SAMSUNG Electronics Co., Ltd.
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Publications (1)
Proceedings Article | 27 April 2023 Presentation + Paper
Novel depth quantification technique of buried defect for development of non-destructive optical inspection
Min Ho Rim, Jongsok Yi, Jungtaek Lim, Souk Kim, Younghoon Sohn
Proceedings Volume 12496, 124961R (2023) https://doi.org/10.1117/12.2656994
KEYWORDS: Optical inspection, Signal to noise ratio, Nondestructive evaluation, Visualization, Inspection, Geometrical optics, Semiconducting wafers, Light sources and illumination, Image analysis, Design rules
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