Mr. Joost de Pee Profile

Joost de Pee

at ASML Netherlands BV

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Publications (1)

Proceedings Article | 23 March 2020 Paper

High-NA EUV lithography optics becomes reality

Lars Wischmeier, Paul Graeupner, Peter Kuerz, Winfried Kaiser, Jan van Schoot, Joerg Mallmann, Joost de Pee, Judon Stoeldraijer

Proceedings Volume 11323, 1132308 (2020) https://doi.org/10.1117/12.2543308

KEYWORDS: Light sources and illumination, Lithographic illumination, Mirrors, Metrology, EUV optics, Projection systems, Optics manufacturing, Lithography, Extreme ultraviolet, Extreme ultraviolet lithography

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