Mr. Juha Aaltonen Profile

Juha Aaltonen

Laboratory Engineer at Helsinki Institute of Physics

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Author

Publications (11)

Proceedings Article | 5 May 2012 Paper

IR-SWLI for subsurface imaging of large MEMS structures

A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, T. Ylitalo, O. Saresoja, M. Berdova, S. Franssila, E. Hæggström

Proceedings Volume 8430, 843018 (2012) https://doi.org/10.1117/12.922105

KEYWORDS: Light emitting diodes, Microelectromechanical systems, Light sources, Halogens, Silicon, Objectives, Infrared imaging, Optical interferometry, Nondestructive evaluation, Sensors

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Proceedings Article | 15 February 2012 Paper

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, E. Haeggström

Proceedings Volume 8250, 825008 (2012) https://doi.org/10.1117/12.906178

KEYWORDS: Bridges, Light emitting diodes, Light sources, Microelectromechanical systems, 3D metrology, Optical testing, Visible radiation, Silicon, Optical interferometry, Lamps

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Proceedings Article | 10 September 2011 Paper

Non-phosphor white LED light source for interferometry

V. Heikkinen, J. Aaltonen, I. Kassamakov, B. Wälchli, H. Räikkönen, T. Paulin, E. Hæggström

Proceedings Volume 8133, 813309 (2011) https://doi.org/10.1117/12.893691

KEYWORDS: Light emitting diodes, Light sources, Light, Optical testing, Interferometers, Switching, Halogens, Interferometry, Signal to noise ratio, 3D metrology

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Proceedings Article | 27 May 2011 Paper

Hybrid light source for scanning white light interferometry-based MEMS quality control

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, H. Räikkönen, B. Wälchli, T. Paulin, I. Kassamakov, K. Grigoras, S. Franssila, E. Hæggström

Proceedings Volume 8082, 80822O (2011) https://doi.org/10.1117/12.889362

KEYWORDS: Light sources, Light emitting diodes, Light, Microelectromechanical systems, Halogens, Optical testing, Interferometry, Fluorescent materials, Lamps, Silicon

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Proceedings Article | 26 February 2011 Paper

Infrared scanning white light interferometry using a solid state light source

V. Heikkinen, J. Aaltonen, B. Wälchli, H. Räikkönen, I. Kassamakov, T. Cholakova, K. Grigoras, S. Franssila, R. Kakanakov, E. Hæggström

Proceedings Volume 7928, 792809 (2011) https://doi.org/10.1117/12.874966

KEYWORDS: Light sources, Light emitting diodes, Cameras, Silicon, Optical testing, Light, Infrared cameras, Optical interferometry, Ocean optics, Infrared radiation

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Proceedings Article | 12 October 2010 Paper

Determining the chronological order of crossing lines using 3D imaging techniques

V. Heikkinen, C. Barbeau, I. Kassamakov, S. Lehto, T. Reinikainen, J. Aaltonen, E. Hæggström

Proceedings Volume 7838, 78380T (2010) https://doi.org/10.1117/12.864940

KEYWORDS: 3D image processing, Curium, Forensic science, 3D metrology, Confocal microscopy, Laser engraving, Stereoscopy, Copper, Microscopes, Linear filtering

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Proceedings Article | 17 June 2009 Paper

Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices

Kalle Hanhijärvi, Juha Aaltonen, Ivan Kassamakov, Lauri Sainiemi, Kestutis Grigoras, Sami Franssila, Edward Hæggström

Proceedings Volume 7389, 73892Z (2009) https://doi.org/10.1117/12.827522

KEYWORDS: Bridges, Optical flow, Microelectromechanical systems, Oxides, Molecular bridges, Semiconducting wafers, Interferometry, Phase measurement, Etching, Silica

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Proceedings Article | 28 April 2008 Paper

Effect of LED spectral shift on vertical resolution in stroboscopic white light interferometry

Kalle Hanhijärvi, Juha Aaltonen, Ivan Kassamakov, Kestutis Grigoras, Lauri Sainiemi, Sami Franssila, Edward Hæggström

Proceedings Volume 7003, 70031S (2008) https://doi.org/10.1117/12.780972

KEYWORDS: Light emitting diodes, Light sources, Bridges, Optical interferometry, Microelectromechanical systems, Sensors, Semiconducting wafers, Phase shifts, Spectral resolution, CCD cameras

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Proceedings Article | 28 April 2006 Paper

Characterization of dents and grooves on polymer films using scanning white light interferometry

Ivan Kassamakov, Kari Ojala, Ari Salmi, Edward Hæggström, Juha Aaltonen, Arne Huber, Heimo Saarikko, Mathias Österberg, Markku Oinonen

Proceedings Volume 6188, 61881G (2006) https://doi.org/10.1117/12.662089

KEYWORDS: Polymers, Resistance, Polymer thin films, Surface finishing, Optical interferometry, Interferometers, Visibility, Spherical lenses, Thin films, Beam splitters

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Proceedings Article | 9 December 2004 Paper

Scanning white light interferometry for quality control of transparent polymer films

Ivan Kassamakov, Juha Aaltonen, Edward Haeggstrom, Mathias Osterberg

Proceedings Volume 5578, (2004) https://doi.org/10.1117/12.567057

KEYWORDS: Polymers, Polymer thin films, Refractive index, Surface roughness, Calibration, Interferometers, Glasses, Light sources, Diamond, Capacitors

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Proceedings Article | 9 December 2004 Paper

Scanning white light interferometry in quality control of single-point tape automated bonding

Henri Seppanen, Ivan Kassamakov, Markku Oinonen, Edward Hæggstrom, Juha Aaltonen, Zoran Radivojevic, Mathias Osterberg

Proceedings Volume 5578, (2004) https://doi.org/10.1117/12.567064

KEYWORDS: Aluminum, Ultrasonics, Optical interferometry, Lead, Interferometers, Copper, Nondestructive evaluation, Imaging devices, Inspection, Lamps

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Showing 5 of 11 publications

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