In testing of high-numerical-aperture spherical lenses, conventional Fizeau interferometry with a mechanical phase modulator suffers from spatial nonuniformity of the phase steps within the observation aperture. The amount of phase modulation decreases rapidly in the marginal region of the aperture due to a geometrical effect, which results in a systematic error of several nanometers in the measured object profile. We propose a synthesis of phase-shifting algorithms in which several algorithms designed for different phase steps operate on the same set of interference fringes recorded in a single phase-shift sequence. Then, the object phase is determined from each of the algorithms for each aperture division. The resultant phase distribution showed minimal systematic errors.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.