Mr. Katsuya Abe Profile

Katsuya Abe

at KIOXIA Corp.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 13 June 2022 Presentation

Evaluation of alignment accuracy for nano-imprint lithography

Kazuya Fukuhara, Masaki Mitsuyasu, Ryo Ogawa, Katsuya Abe, Anupam Mitra, Sachiko Kobayashi, Satoshi Mitsugi, Motofumi Komori, Takuya Kono

Proceedings Volume PC12054, PC120540B (2022) https://doi.org/10.1117/12.2614407

KEYWORDS: Optical alignment, Semiconducting wafers, Nanoimprint lithography, Lithography, Semiconductor manufacturing, Semiconductors, Overlay metrology, Optical simulations, Manufacturing, Wafer-level optics

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Proceedings Article | 26 May 2022 Presentation + Paper

Design process integration enabling the productivity enhancement for nanoimprint lithography

Sachiko Kobayashi, Satoshi Mitsugi, Katsuyoshi Kodera, Kazuya Fukuhara, Anupam Mitra, Koki Ueha, Katsuya Abe, Motofumi Komori, Shingo Kanamitsu, Takuya Kono

Proceedings Volume 12052, 1205208 (2022) https://doi.org/10.1117/12.2614319

KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Optical alignment, Optical lithography, Scanning electron microscopy, Ultraviolet radiation, Lithography, Scanning transmission electron microscopy

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