Dr. Kristin Gerold
at Fraunhofer-IOF
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 29 August 2022 Paper
Proceedings Volume 12188, 121884Y (2022) https://doi.org/10.1117/12.2628258
KEYWORDS: Diffraction gratings, Diffraction, Polarization, Ultraviolet radiation, Lithography, Electron beam lithography, Scanning electron microscopy, Prototyping, Optical design, Atomic layer deposition

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