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Dr. Kyu-Hwa Jeong
at Intel Corp
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Publications (1)
Proceedings Article | 24 March 2009 Paper
Implementation of multiple ROI with single FOV for advanced mask metrology
Kyu-hwa Jeong, Hatsey Frezghi, Malahat Tavassoli, Stephen Kim, Ray Morgan
Proceedings Volume 7272, 72724D (2009) https://doi.org/10.1117/12.826930
KEYWORDS: Scanning electron microscopy, Metrology, Time metrology, Photomasks, Resolution enhancement technologies, Optical proximity correction, Computed tomography, Critical dimension metrology, Cadmium, Control systems
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