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Dr. Laurent Montès
at IMEP-LAHC
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Author
Publications (1)
Proceedings Article | 10 June 2013 Paper
Thermally actuated micropump for biological and medical application
D. Rabaud, R. Lefevre, A. Salette, L. Dargent, H. Marko, Q. Le Masne, C. Dehan, P. Morfouli, L. Montès
Proceedings Volume 8765, 876506 (2013) https://doi.org/10.1117/12.2017916
KEYWORDS: Aluminum, Finite element methods, Silicon, Optical lithography, Actuators, Temperature metrology, Oxides, Thermal modeling, Microelectromechanical systems, Semiconductors
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