In this paper, industrial robot is used as motion carrier and self-developed flexible wheel tool is used as polishing tool to realize low-cost, high-efficiency, and high-precision optical processing. Firstly, the mapping formula between the workpiece coordinates and the road point coordinates is deduced, and the position and posture data required for robot programming are obtained. Secondly, a new type of wheel polishing tool is designed, which controls the polishing pressure through a pneumatic floating structure to ensure the stability of the removal function. Finally, an off-axis paraboloid of φ345mm was processed using this technology. After three times of processing for 10 hours, the surface error converged from PV-2.111λ, RMS-0.249λ to PV-0.119λ, RMS-0.01λ. PV and RMS converged by 94% and 96%, respectively. This proves that the technology has the advantages of high efficiency and high precision, and is expected to be widely used in the field of precision optical processing.
A variable curvature mirror (VCM) fabricated by 3D printing technique which is thickness optimized in structure design to reduce spherical aberration and supposed to be used in zoom imaging system is investigated. First, measurement and parameters fix of the mirror blank printed by 3D printing of AlSi10Mg are done for its precision deviation introduce by the manufacturing method. Second, elementary optical polishing is done for the purpose of Nickel plated. Fine optical polishing is applied on the VCM after the Nickel plated. Third, an actuation test experiment is built and tested by piezoelectric actuators of PI with nanometer precision and Zygo interferometer. The original surface figure accuracy of 90% radius is 2.225 λ / 0.394 λ (λ = 632.8 nm). As a result, within the ultimate testing range of the interferometer, the VCM achieve about 8.68μm deformation with the corresponding position change of actuator is 18μm, which is about 50% of it. Finally, an experiment of zoom imaging effect is done. The experiment shows that it does have effect to the zoom imaging which can compensate the defocus within 230.7μm. From the performance of the VCM at this stage, it can be used in infrared imaging. For the following work, its structure will be further optimized and the precision problems will be solved through using more proper manufacture method to improve its radius change performance during actuation process. Therefore, it can be used in visible light imaging in the future.
Computer-controlled optical surface forming technology (CCOS) can greatly improve the processing accuracy and processing efficiency of optical mirrors. The most critical problem is the solution of dwell time, which will directly affect the final convergence of the surface shape. it is found through analysis that the solution of the dwell time is a deconvolution process, which is the same as the mathematical model of the Lucy–Richardson algorithm in image restoration technology, so the algorithm can be applied to Solution of dwell time; At the same time, in order to eliminate the high-frequency shape errors caused by discontinuities at the edges of the face shapes, the original shapes need to be extended to achieve smooth connections. The two-dimensional Gercherg bandwidth-limited continuation algorithm can achieve this requirement. The simulation results show that the root mean square value (rms) and peak-valley value (pv) converge from the initial 0.2534λ, 1.494λ (λ=632.8nm) to 0.0158λ and 0.393λ, which proves the effectiveness of the algorithm. Compared with the Lucy-Richardson algorithm, other traditional solving methods have simpler calculation process, higher calculation efficiency, and higher convergence rate.
An ABB IRB6640 industrial robot is used as a processing platform for optical polishing. The relationships of coordinate systems are defined, the algorithm of coordinate transformation, Euler angles and quaternion are provided. M-like removal function and Gaussian-like removal function are used to simulation process an off-axis aspheric surface. The surface error after polishing by M-like removal function is 1.5 to 2.5 times bigger than Gaussian-like removal function. This proves that M-like removal function also has good convergence speed. Then, the pentagram polishing head is used to polish a Φ600mm off-axis paraboloid surface. After 15 cycles, about 120 hours processing, PV converges from 5.8μm to 0.836μm, RMS converges from 1.2μm to 0.054μm, PV and RMS respectively converge 85% and 95%. The experiment shows M-like removal function has good convergence speed.
Variable curvature mirror (VCM) can change its curvature radius dynamically and is usually used to correct the defocus and spherical aberration caused by thermal lens effect to improve the output beam quality of high power solid-state laser. Recently, the probable application of VCM in realizing non-moving element optical zoom imaging in visible band has been paid much attention. The basic requirement for VCM lies in that it should provide a large enough saggitus variation and still maintains a high enough surface figure at the same time. Therefore in this manuscript, by combing the pressurization based actuation with a variable thickness mirror design, the purpose of obtaining large saggitus variation and maintaining quite good surface figure accuracy at the same time could be achieved. A prototype zoom mirror with diameter of 120mm and central thickness of 8mm is designed, fabricated and tested. Experimental results demonstrate that the zoom mirror having an initial surface figure accuracy superior to 1/80λ could provide bigger than 36um saggitus variation and after finishing the curvature variation its surface figure accuracy could still be superior to 1/40λ with the spherical aberration removed, which proves that the effectiveness of the theoretical design.
Zoom mirror is a kind of active optical component that can change its curvature radius dynamically. Normally, zoom mirror is used to correct the defocus and spherical aberration caused by thermal lens effect to improve the beam quality of high power solid-state laser since that component was invented. Recently, the probable application of zoom mirror in realizing non-moving element optical zoom imaging in visible band has been paid much attention. With the help of optical leveraging effect, the slightly changed local optical power caused by curvature variation of zoom mirror could be amplified to generate a great alteration of system focal length without moving elements involved in, but in this application the shorter working wavelength and higher surface figure accuracy requirement make the design and fabrication of such a zoom mirror more difficult. Therefore, the key to realize non-moving element optical zoom imaging in visible band lies in zoom mirror which could provide a large enough saggitus variation while still maintaining a high enough surface figure. Although the annular force based actuation could deform a super-thin mirror having a constant thickness to generate curvature variation, it is quite difficult to maintain a high enough surface figure accuracy and this phenomenon becomes even worse when the diameter and the radius-thickness ratio become bigger. In this manuscript, by combing the pressurization based actuation with a variable thickness mirror design, the purpose of obtaining large saggitus variation and maintaining quite good surface figure accuracy at the same time could be achieved. A prototype zoom mirror with diameter of 120mm and central thickness of 8mm is designed, fabricated and tested. Experimental results demonstrate that the zoom mirror having an initial surface figure accuracy superior to 1/50λ could provide at least 21um saggitus variation and after finishing the curvature variation its surface figure accuracy could still be superior to 1/20λ, which proves that the effectiveness of the theoretical design.
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