This paper takes the cantilever beam MEMS switch as an example to discuss mechanical principle and function
simulation of the RF MEMS switch used in radio frequency communication. We select three kind s of the cantilever
beams with different sections to analyze their switch characteristics, and with the help of finite element analysis(FEA)
software ANSYS, multi-physical coupling analysis and simulation are carried out. The threshold voltage, the inherent
frequency of these beams, optimal design, random vibration analysis and fatigue lifetime analysis are also discussed in
detail. The results provide a good theoretical help to design various high performance RF MEMS switches with
variational section beam.
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