KEYWORDS: Sensors, Signal to noise ratio, Charge-coupled devices, Electron microscopy, Photons, Active sensors, Modulation transfer functions, Spatial resolution, Cadmium sulfide, Electron beams
In a longstanding effort to overcome limits of film and the charge coupled device (CCD) systems in electron microscopy, we have developed a radiation-tolerant system that can withstand direct electron bombardment. A prototype Direct Detection Device (DDD) detector based on an Active Pixel Sensor (APS) has delivered unprecedented performance with an excellent signal-to-noise ratio (approximately 5/1 for a single incident electron in the range of 200-400 keV) and a very high spatial resolution. This intermediate size prototype features a 512×550 pixel format of 5&mgr;m pitch. The detector response to uniform beam illumination and to single electron hits is reported. Radiation tolerance with high-energy electron exposure is also impressive, especially with cooling to -15 °C. Stable performance has been demonstrated, even after a total dose of 3.3×106 electrons/pixel. The characteristics of this new detector have exciting implications for transmission electron microscopy, especially for cryo-EM as applied to biological macromolecules.
High resolution electron imaging is very important in nanotechnology and biotechnology fields. For example, Cryogenic Electron-Microscopy is a promising method to obtain 3-D structures of large protein complexes and viruses. We report on the design and measurements of a new CMOS direct-detection camera system for electron imaging. The
active pixel sensor array that we report on includes 512 by 550 pixels, each 5 by 5 μm in size, with an ~8 μm epitaxial layer to achieve an effective fill factor of 100%. Spatial resolution of 2.3 μm for a single incident e- has been measured. Electron microscope tests have been performed with 200 and 300 keV beams, and the first recorded Electron Microscope image is presented.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.