Ms. Limei Liu Profile

Limei Liu

at Semiconductor Manufacturing International Corp

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Publications (2)

Proceedings Article | 20 March 2019 Paper

An efficient way of automatic layout decomposition and pattern classification

Zhenzhen Wan, Limei Liu, Huan Kan, Qijian Wan, Xinyi Hu, Zhengfang Liu, Chunshan Du

Proceedings Volume 10962, 1096214 (2019) https://doi.org/10.1117/12.2515137

KEYWORDS: Image classification, Library classification systems, Databases, Logic, Metals, Standards development, Front end of line, Back end of line, Design for manufacturing

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Proceedings Article | 4 April 2017 Paper

A random generation approach to pattern library creation for full chip lithographic simulation

Elain Zou, Sid Hong, Limei Liu, Lucas Huang, Legender Yang, Aliaa Kabeel, Kareem Madkour, Wael ElManhawy, Joe Kwan, Chunshan Du, Xinyi Hu, Qijian Wan, Recoo Zhang

Proceedings Volume 10148, 1014811 (2017) https://doi.org/10.1117/12.2258133

KEYWORDS: Standards development, Phase modulation, Probability theory, Design for manufacturability, Lithography, Library classification systems, Visualization, Image classification, Intellectual property, Monte Carlo methods, Computer simulations

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