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Liujiang Yu
at Nanyang Technological Univ
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Publications (1)
Proceedings Article | 29 April 2003 Paper
Fabrication of smooth thin diamond-like carbon microstructures by photolithography together with dry and wet etching techniques
Liujiang Yu, BengKong Tay, Divakaran Sheeja
Proceedings Volume 5118, (2003) https://doi.org/10.1117/12.498877
KEYWORDS: Carbon, Raman spectroscopy, Optical lithography, Wet etching, Silicon, Fabrication, Reactive ion etching, Etching, Ions, Silicon films
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