CONFERENCE PROCEEDINGS
Advanced Search
Dr. Martin O'Toole
at imec
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 25 May 2022 Presentation + Paper
Patterning of Ru metal lines at 18nm pitch
Stefan Decoster, Souvik Kundu, Frédéric Lazzarino, Stéphane Larivière, Martin O'Toole, Gayle Murdoch, Quoc Toan Le, Marleen van der Veen, Nancy Heylen
Proceedings Volume 12056, 1205604 (2022) https://doi.org/10.1117/12.2614267
KEYWORDS: Metals, Ruthenium, Etching, Double patterning technology, Reactive ion etching
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top