Dr. Quoc Toan Le
at imec
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 25 May 2022 Presentation + Paper
Stefan Decoster, Souvik Kundu, Frédéric Lazzarino, Stéphane Larivière, Martin O'Toole, Gayle Murdoch, Quoc Toan Le, Marleen van der Veen, Nancy Heylen
Proceedings Volume 12056, 1205604 (2022) https://doi.org/10.1117/12.2614267
KEYWORDS: Metals, Ruthenium, Etching, Double patterning technology, Reactive ion etching

Proceedings Article | 26 February 2021 Presentation + Paper
D. De Simone, L. Kljucar, P. Das, R. Blanc, C. Beral, J. Severi, N. Vandenbroeck, P. Foubert, A. Charley, A. Oak, D. Xu, W. Gillijns, J. Mitard, Z. Tokei, M. van der Veen, N. Heylen, L. Teugels, Q. T. Le, F. Schleicher, P. Leray, K. Ronse, Il Hwan Kim, Insung Kim, Changmin Park, Jisun Lee, Koungmin Ryu, P. De Schepper, J. Doise, M. Kocsis
Proceedings Volume 11609, 116090Q (2021) https://doi.org/10.1117/12.2584713
KEYWORDS: Extreme ultraviolet lithography, Optical lithography, Oxides, Metals, Extreme ultraviolet, Scanners, Scanning electron microscopy, Photoresist processing, Lithography, Line edge roughness

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