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Maxim Lyakhovetskiy
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Publications (1)
Proceedings Article | 1 August 2021 Poster + Paper
Effect of PACVD deposition of nitride and Si-containing amorphous hydrogenated carbon films on the tribological characteristics of SiAlON ceramics
Proceedings Volume 11802, 118020T (2021) https://doi.org/10.1117/12.2594085
KEYWORDS: Ceramics, Resistance, Carbon, Diamond, Thin film coatings, Plastic coatings, Manufacturing, Surface finishing
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