Dr. Michael Feser Profile

Dr. Michael Feser

CEO at Lyncean Technologies Inc

SPIE Involvement:

Author

Proceedings Article | 16 October 2017 Paper

A 1kW EUV source for lithography based on FEL emission in a compact storage ring

Michael Feser, Ron Ruth, Rod Loewen

Proceedings Volume 10450, 1045011 (2017) https://doi.org/10.1117/12.2280716

KEYWORDS: Extreme ultraviolet, Free electron lasers, Light sources, Lithography, X-rays, Synchrotron technology, Clouds, Atmospheric particles, Electron beams, Synchrotrons

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Proceedings Article | 19 September 2017 Presentation

The Lyncean Compact Light Source: x-ray synchrotron radiation for analytical and imaging applications (Conference Presentation)

Michael Feser

Proceedings Volume 10387, 1038703 (2017) https://doi.org/10.1117/12.2277898

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The Lyncean Compact Light Source (CLS) is a true miniature synchrotron x-ray source with undulator output x-ray characteristics (inherently monochromatic, tunable, high flux). The compact size (8m x 4m) is accomplished by employing a low energy (45 MeV) electron beam storage ring combined with a sub-micrometer period “laser undulator” replacing the permanent magnets of traditional undulators. The output beam of the Lyncean CLS is axially symmetric with 4 mrad beam divergence, a 4% bandwidth and tunable from 8 to 35 keV by changing the energy of the stored electron beam. It delivers 1010 photons per second to experimental end stations located outside of the CLS shielded enclosure. The first commercial installation of a Lyncean CLS is at the Technical University Munich (TUM) in Germany. Applications pursued there are primarily Talbot grating based multi-modal imaging and tomography (quantitative absorption/phase contrast, dark field) and high-resolution x-ray tomography. The Lyncean CLS is very well matched to these measurements due to the inherent coherence property, Monochromaticity (no beam hardening + quantitation) and the high flux. Analytical applications using specifically developed multilayer focusing optics have been demonstrated at the Lyncean factory in the USA. Protein crystallography with freely selectable x-ray energy to enable advanced phasing techniques such as single wavelength anomalous dispersion (SAD) are possible. Other examples include powder diffraction and small angle scattering to name a few. Operating the Lyncean CLS has been made extremely simple for users. The complexity of the system is packaged into easy to use interfaces enabling non-experts to run the machine after one week of training. The special characteristic of the Lyncean CLS of producing a truly symmetric and monochromatic beam without contamination by higher x-ray energies (compared to traditional synchrotrons) allows very simple beam transport systems and experimental stations with relaxed shielding requirements to be utilized.

Proceedings Article | 18 September 2015 Paper

X-ray microscopy for in situ characterization of 3D nanostructural evolution in the laboratory

Benjamin Hornberger, Hrishikesh Bale, Arno Merkle, Michael Feser, William Harris, Sergey Etchin, Marty Leibowitz, Wei Qiu, Andrei Tkachuk, Allen Gu, Robert Bradley, Xuekun Lu, Philip Withers, Amy Clarke, Kevin Henderson, Nikolaus Cordes, Brian Patterson

Proceedings Volume 9592, 95920Q (2015) https://doi.org/10.1117/12.2188728

KEYWORDS: X-rays, Image resolution, X-ray microscopy, X-ray imaging, 3D image processing, Stereoscopy, Microscopes, Crystals, Synchrotrons, Polymers

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Proceedings Article | 9 September 2009 Paper

Absolute efficiency measurement of high-performance zone plates

Sharon Chen, Alan Lyon, Janos Kirz, Srivatsan Seshadri, Yan Feng, Michael Feser, Simone Sassolini, Fred Duewer, Xianghui Zeng, Carson Huang

Proceedings Volume 7448, 74480D (2009) https://doi.org/10.1117/12.825367

KEYWORDS: Zone plates, Image filtering, Tungsten, Copper, Cobalt, Optical filters, X-rays, X-ray sources, Photons, Synchrotrons

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Proceedings Article | 22 May 2009 Paper

Multiscale 3D bioimaging: from cell, tissue to whole organism

S. Lau, Ge Wang, Margam Chandrasekeran, Victor Fan, Mohd Nazrul, Hauyee Chang, Tiffany Fong, Jeff Gelb, Michael Feser, Wenbing Yun

Proceedings Volume 7378, 73781V (2009) https://doi.org/10.1117/12.828043

KEYWORDS: Tissues, Image resolution, Bone, X-rays, Tissue optics, 3D image processing, X-ray computed tomography, Tomography, Organisms, Cartilage

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While electron microscopes and AFMs are capable of high resolution imaging to molecular levels, there is an ongoing problem in integrating these results into the larger scale structure and functions of tissue and organs within a complex organism. Imaging biological samples with optical microscopy is predominantly done with histology and immunohistochemistry, which can take up to a several weeks to prepare, are artifact prone and only available as individual 2D images. At the nano resolution scale, the higher resolution electron microscopy and AFM are used, but again these require destructive sample preparation and data are in 2D. To bridge this gap, we describe a rapid non invasive hierarchical bioimaging technique using a novel lab based x-ray computed tomography to characterize complex biological organism in multiscale- from whole organ (mesoscale) to calcified and soft tissue (microscale), to subcellular structures, nanomaterials and cellular-scaffold interaction (nanoscale). While MicroCT (micro x-ray computed tomography) is gaining in popularity for non invasive bones and tissue imaging, contrast and resolution are still vastly inadequate compared to histology. In this study we will present multiscale results from a novel microCT and nanoCT (nano x-ray tomography system). The novel MicroCT can image large specimen and tissue sample at histology resolution of submicron voxel resolution, often without contrast agents, while the nanoCT using x-ray optics similar to those used in synchrotron radiation facilities, has 20nm voxel resolution, suitable for studying cellular, subcellular morphology and nanomaterials. Multiscale examples involving both calcified and soft tissue will be illustrated, which include imaging a rat tibia to the individual channels of osteocyte canaliculli and lacunae and an unstained whole murine lung to its alveoli. The role of the novel CT will also be discussed as a possible means for rapid virtual histology using a biopsy of a human regenerated bone sample done without contrast agents and that of other soft tissues with contrast agents. Comparison between histology, SEM and MRI will be given.

Proceedings Article | 7 September 2006 Paper

High-resolution x-ray tomography using laboratory sources

Andrei Tkachuk, Michael Feser, Hongtao Cui, Fred Duewer, Hauyee Chang, Wenbing Yun

Proceedings Volume 6318, 63181D (2006) https://doi.org/10.1117/12.682383

KEYWORDS: X-rays, Zone plates, Microscopes, Copper, X-ray imaging, Tomography, Phase contrast, Silicon, Objectives, X-ray detectors

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Proceedings Article | 29 August 2006 Paper

Measurement of zone plate efficiencies in the extreme ultraviolet and applications to radiation monitors for absolute spectral emission

John Seely, Glenn Holland, James Bremer, Tim Zukowski, Michael Feser, Yan Feng, Benjawan Kjornrattanawanich, Leonid Goray

Proceedings Volume 6317, 63170N (2006) https://doi.org/10.1117/12.678142

KEYWORDS: Sensors, Extreme ultraviolet, Zone plates, Diffraction, Visible radiation, Silicon, Gold, Signal detection, Solar radiation, Transmittance

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The diffraction efficiencies of a Fresnel zone plate (ZP), fabricated by Xradia Inc. using the electron-beam writing technique, were measured using polarized, monochromatic synchrotron radiation in the extreme ultraviolet wavelength range 3.4-22 nm. The ZP had 2 mm diameter, 3330 zones, 150 nm outer zone width, and a 1 mm central occulter. The ZP was supported by a 100 nm thick Si₃N₄ membrane. The diffraction patterns were recorded by CMOS imagers with phosphor coatings and with 5.2 μm or 48 μm pixels. The focused +n orders (n=1-4), the diverging -1 order, and the undiffracted 0 order were observed as functions of wavelength and off-axis tilt angle. Sub-pixel focusing of the +n orders was achieved. The measured efficiency in the +1 order was in the 5% to 30% range with the phase-shift enhanced efficiency occurring at 8.3 nm where the gold bars are partially transmitting. The +2 and higher order efficiencies were much lower than the +1 order efficiency. The efficiencies were constant when the zone plate was tilted by angles up to ±1° from the incident radiation beam. This work indicates the feasibility and benefits of using zone plates to measure the absolute EUV spectral emissions from solar and laboratory sources: relatively high EUV efficiency in the focused +1 order, good out-of-band rejection resulting from the low higher-order efficiencies and the ZP focusing properties, insensitivity to (unfocused) visible light scattered by the ZP, flat response with off-axis angle, and insensitivity to the polarization of the radiation based on the ZP circular symmetry. EUV sensors with Fresnel zone plates potentially have many advantages over existing sensors intended to accurately measure absolute EUV emission levels, such as those implemented on the GOES N-P satellites that use transmission gratings which have off-axis sensitivity variations and poor out-of-band EUV and visible light rejection, and other solar and laboratory sensors using reflection gratings which are subject to response variations caused by surface contamination and oxidation.

Proceedings Article | 9 May 2005 Paper

X-ray microscopy for NDE of micro- and nano-structrues

Steve Wang, Frederick Duewer, Michael Feser, David Scott, Wenbing Yun

Proceedings Volume 5766, (2005) https://doi.org/10.1117/12.601370

KEYWORDS: X-rays, X-ray imaging, Imaging systems, Microscopes, Tomography, Nondestructive evaluation, Copper, Zone plates, X-ray microscopy, Image resolution

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Proceedings Article | 4 November 2004 Paper

Pathways to sub-10nm x-ray imaging using zone plate lens

Wenbing Yun, Michael Feser, Alan Lyon, Frederick Duewer, Yuxin Wang

Proceedings Volume 5539, (2004) https://doi.org/10.1117/12.568199

KEYWORDS: Zone plates, Diffraction, X-rays, Microscopes, X-ray imaging, Spatial resolution, Synchrotron x-ray imaging, Image resolution, X-ray sources, X-ray technology

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Proceedings Article | 20 December 2001 Paper

Scanning transmission soft x-ray microscopy at beamline X-1A at the NSLS: advances in instrumentation and selected applications

Michael Feser, Tobias Beetz, Chris Jacobsen, Janos Kirz, Sue Wirick, Aaron Stein, Thorsten Schaefer

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450955

KEYWORDS: Iron, Sensors, X-ray microscopy, X-rays, Microscopes, Phase contrast, Oxides, Image segmentation, Absorption, X-ray imaging

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Proceedings Article | 13 December 2001 Paper

Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy

Michael Feser, Chris Jacobsen, Pavel Rehak, Gianluigi DiGeronimo, Peter Holl, Lothar Strueder

Proceedings Volume 4499, (2001) https://doi.org/10.1117/12.450229

KEYWORDS: Sensors, X-rays, X-ray detectors, Image segmentation, X-ray microscopy, Silicon, Photodetectors, Time correlated photon counting, Electronics, Solid state electronics

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Proceedings Article | 6 November 1998 Paper

Applications and instrumentation advances with the Stony Brook scanning transmission x-ray microscope

Michael Feser, Mary Carlucci-Dayton, Chris Jacobsen, Janos Kirz, Ulrich Neuhaeusler, Graham Smith, Bo Yu

Proceedings Volume 3449, (1998) https://doi.org/10.1117/12.330348

KEYWORDS: Microscopes, Zone plates, Sensors, X-rays, Image resolution, Calcium, Glasses, X-ray detectors, X-ray microscopy, X-ray imaging

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Showing 5 of 12 publications

Conference Committee Involvement (3)

X-Ray Nanoimaging: Instruments and Methods III

7 August 2017 | San Diego, California, United States

X-Ray Nanoimaging: Instruments and Methods II

12 August 2015 | San Diego, California, United States

X-Ray Nanoimaging: Instruments and Methods

28 August 2013 | San Diego, California, United States

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