Mr. Michael E. Ungureit Profile

Michael E. Ungureit

Laser Engineer

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Publications (2)

Proceedings Article | 6 December 2004 Paper

Next-generation DUV ALTA mask patterning capabilities

Paul Allen, Michael Bohan, Eric Christenson, H. Christopher Hamaker, Sam Howells, Boaz Kenan, Peter Pirogovsky, Malik Sadiq, Robin Teitzel, Michael White, Michael Ungureit, Alan Wickstrom, Robert Kiefer, Curt Jackson

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.570291

KEYWORDS: Photomasks, Deep ultraviolet, Semiconducting wafers, Reticles, Lithography, Vestigial sideband modulation, Signal detection, Artificial intelligence, Servomechanisms, Mirrors

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Proceedings Article | 20 August 2004 Paper

DUV ALTA system aerial image enhancement for improved pattern fidelity: phase II

Michael Ungureit, Samuel Howells, T. Chabreck, J. Hubbard, Asher Klatchko, Peter Pirogovsky, Robin Teitzel, Andrew Berwick, B. Skyborg, Paul Allen, Cris Morgante, Michael White

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557806

KEYWORDS: Artificial intelligence, Image enhancement, Evolutionary algorithms, Vestigial sideband modulation, Photomasks, Optical proximity correction, Deep ultraviolet, Scanning electron microscopy, Metals, Field programmable gate arrays

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