In reverse Hartmann measurement, the display often undergoes thermal deformation due to self-heating, which can cause drift of pixels on the screen and cause errors in the measurement results. A multilayer LCD model was established based on a linear elastic material model, and the influence of thermal deformation of the display on measurement results was analyzed under different backlighting modes. The results show that when uniformly heated, the PV value increases by 40 nm for each degree of temperature increase in the display, and the main surface errors are tilt and astigmatism under different temperature fields.
As a kind of common aspheric element, high-gradient aspheric surface is more and more used in high-tech fields because of its advantages of improving system accuracy and optimizing system comprehensive performance. At the same time, it also has higher requirements for its surface processing quality. The trajectory planning in polishing is an important part that affects the surface quality of the component. Due to the continuous change of the curvature radius of the high-steep aspheric surface and the large change rate of the vector height, the commonly used planar equidistant grating scanning trajectory is projected onto its surface. The distribution of trajectory points on the surface is obviously uneven, resulting in over polishing or under polishing in some areas. In order to ensure the machining accuracy of high-gradient aspheric surface, the concept of “common equal arc length point” is proposed and the equal arc length trajectory point planning model is established to make the spatial distance of any adjacent trajectory points on the aspheric surface consistent, and the spatial interval change rate is introduced to quantitatively analyze the distribution of trajectory points. Several aspheric surfaces with different vector height change rates are sampled by the equal arc length trajectory point model. Under the same sampling accuracy as the plane equidistant grid scanning trajectory point model, the change rate of the trajectory point spacing to the surface shape is reduced from 70.72 % ~ 33.03 %to 25.18%~8.75 %. The simulation results show the effectiveness of the model.
Inertial Confinement Fusion (ICF) is a promising controlled fusion technology. In order to suppress the distortion generated during the laser transmission process of ICF, beam smoothing technology is crucial. Continuous Phase Plate (CPP) has attracted widespread attention due to its high energy utilization efficiency, as well as its easy-to-control focal spot shape. However, CPP is a complex freeform surface structure with multiple cycles and large gradients, and its modulation performance is closely related to the surface slope. Therefore, a simulation processing method based on slope removal model for CPP is proposed. A slope removal model is constructed, removal strategies are formulated, and a gradient threshold for dwell time is set to ensure continuous and smooth motion of the machine tool. The slope removal model is used for simulation processing, and the residual between the slope surface shape of CPP and the standard slope surface shape can be converged from an initial RMS of 4.32 μrad to 0.337 μrad. In order to further verify the accuracy of the model, the inverse gradient algorithm is used to restore the slope to the height. Compared with the designed standard height surface, the RMS value of the height residual converges from 0.209 μm to 0.130 μm. Based on the characteristics of the machine tool, an analysis and exploration is carried out, and a gradient threshold for adjacent dwell time is set. The result shows that the slope model can achieve initial simulation processing of CPP.
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