Scanning Microwave Impedance Microscopy (sMIM), a new electrical measurement mode for AFM, has shown significant success in the imaging and characterization of electrical properties at 10's of nm length scales. We review the state of the art, including imaging studies revealing electrical characteristics of novel materials and nanostructures, such as composites, graphene, patterned optical crystals and ferro-electrics. The technique is suited for a variety of metrology applications where specific physical properties are determined quantitatively. Examples include the measurement of dielectric constant (permittivity) and conductivity. These capabilities will be presented, illustrating sensitivity and resolution for dielectric constant, doping levels and capacitance.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.