Pankaj Bhardwaj
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 October 2021 Presentation + Paper
Proceedings Volume 11875, 118750K (2021) https://doi.org/10.1117/12.2597203
KEYWORDS: Calibration, Photoresist materials, Grayscale lithography, Photomasks, Diffraction gratings, Lithography, Data modeling, Transmittance, Photoresist developing

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