Mr. Peng Wang Profile

Peng Wang

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Publications (3)

Proceedings Article | 22 December 2015 Paper

Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications

Ssu-Han Chen, Aron Michael, Chee Yee Kwok, Peng Wang

Proceedings Volume 9668, 96682C (2015) https://doi.org/10.1117/12.2202502

KEYWORDS: Actuators, Sensors, Ferroelectric materials, Thin films, Microopto electromechanical systems, Micro optics, Piezoresistive sensors, Thin film devices, Silicon, Resistors, Wheatstone bridges, Electric field sensors

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Proceedings Article | 22 December 2015 Paper

Misalignment tolerant efficient inverse taper coupler for silicon waveguide

Peng Wang, Aron Michael, Chee Yee Kwok, Ssu-Han Chen

Proceedings Volume 9668, 96682B (2015) https://doi.org/10.1117/12.2202494

KEYWORDS: Waveguides, Silicon, Silica, Cladding, Optical alignment, Interfaces, Polishing, Etching, Tolerancing, Surface finishing, Wafer-level optics, Semiconducting wafers, Telecommunications, Refractive index

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Proceedings Article | 7 December 2013 Paper

On-chip optical nano-scale displacement sensor

Peng Wang, Aron Michael, Chee Yee Kwok

Proceedings Volume 8923, 89233Z (2013) https://doi.org/10.1117/12.2033715

KEYWORDS: Ferroelectric materials, Waveguides, Silicon, Atomic force microscopy, Sensors, Geometrical optics, Actuators, Cladding, Thin films, Silicon films

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