Mr. QiXin Xu Profile

QiXin Xu

at Siemens EDA

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 23 March 2020 Paper

DFM: “Design for Manufacturing” or “Design Friendly Manufacturing” How to convert extra EPE budget into design freedom by SMO

Wenzhan Zhou, Hung-Wen Chao, Yu Zhang, Chan-Yuan Hu, QiXin Xu, Quan Gan, Ao Chen, Gen-Sheng Gao

Proceedings Volume 11328, 113281A (2020) https://doi.org/10.1117/12.2551670

KEYWORDS: Source mask optimization, Design for manufacturing, Manufacturing, Extreme ultraviolet lithography, Design for manufacturability, Optical lithography, Image processing, Neptune, Adaptive optics, Critical dimension metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years