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Rick L. Roehl
Program Manager at Lockheed Martin Santa Barbara Focalplane
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Publications (1)
Proceedings Article | 14 May 2007 Paper
Successful MWIR FPA fabrication using gas cluster ion-beam InSb surface finishing
L. Allen, G. Dallas, K. Blanchet, S. Vangala, C. Santeufemio, W. Goodhue, E. Roehl, C. Jones, J. Barton, B. Zide, V. Difilippo, K. Jones
Proceedings Volume 6542, 65423P (2007) https://doi.org/10.1117/12.718185
KEYWORDS: Chemical mechanical planarization, Surface finishing, Semiconducting wafers, Oxides, Etching, Manufacturing, Staring arrays, Ion beams, Mid-IR, Atomic force microscopy
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