In this study, a light-driven deformable mirror is fabricated by electron beam lithography. The mirror is consisted of a deformation layer and a micromirror array. The deformation layer is made of an azobenzene polymer and the micromirro array is deposited on the deformation layer. The deformation of azobenzene polymer is induced by illuminating a continuum wave beam or femto-second pulse laser beam. Then, the micromirror is displaced. The displacement modulation is experimentally confirmed by interference measurement.
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