Mr. Sean Bailey Profile

Sean Bailey

at Cornell Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper

Jingyuan Deng, Sean Bailey, Christopher Ober

Proceedings Volume 12055, 120550H (2022) https://doi.org/10.1117/12.2605841

KEYWORDS: Extreme ultraviolet lithography, Polymers, Photoresist materials, Bromine

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases