Dr. Sebastian Busch
at Univ of Freiburg
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 May 2013 Paper
Sebastian Busch, Manuel Ketterer, Xenia Vinzenz, Christian Hoffmann, Jürgen Wöllenstein
Proceedings Volume 8763, 87630Z (2013) https://doi.org/10.1117/12.2017434
KEYWORDS: Silicon, Scanning electron microscopy, Nanoparticles, Particles, Atmospheric particles, Adhesives, Semiconducting wafers, Atmospheric modeling, Coating, Atomic force microscopy

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