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Sergey Dubkov
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Publications (1)
Proceedings Article | 26 February 2010 Paper
Formation of carbonic nanostructures using PECVD and glow-discharge plasma at direct current
D. Gromov, S. Gavrilov, S. Dubkov
Proceedings Volume 7521, 75210Y (2010) https://doi.org/10.1117/12.854748
KEYWORDS: Nanostructures, Resistance, Nickel, Graphene, Plasma enhanced chemical vapor deposition, Plasma, Chemical vapor deposition, Carbon, Temperature metrology, Sputter deposition
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