Dr. Shin-Ichiro Kuroki Profile

Dr. Shin-Ichiro Kuroki

at Hiroshima Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 19 January 2005 Paper

Photosensitive porous low-k interlayer dielectric film

Shin-Ichiro Kuroki, Takamaro Kikkawa

Proceedings Volume 5592, (2005) https://doi.org/10.1117/12.570753

KEYWORDS: Silicon, Ultrasonics, Dielectrics, Lithography, Scanning electron microscopy, Photomicroscopy, Molecules, Ultraviolet radiation, Semiconducting wafers, Optical lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years