Dr. Sinjeung Park
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 26 May 2024
JM3, Vol. 23, Issue 02, 021303, (May 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.2.021303
KEYWORDS: Transformers, Visualization, Inspection, Design, Performance modeling, Image classification, Defect detection, Optical proximity correction, Education and training, Deep learning

Proceedings Article | 21 November 2023 Presentation + Paper
Proceedings Volume 12751, 1275109 (2023) https://doi.org/10.1117/12.2685488
KEYWORDS: Transformers, Visualization, Design and modelling, Deep learning, Image classification, Data modeling

Proceedings Article | 22 March 2016 Paper
Sinjeung Park, Jongmun Park, Boram Lee, Jin Choi, In Kyun Shin, Chan-Uk Jeon
Proceedings Volume 9777, 977716 (2016) https://doi.org/10.1117/12.2218340
KEYWORDS: Photomasks, Optical proximity correction, Electron beam lithography, Critical dimension metrology, Vestigial sideband modulation, Diamond patterning, Semiconducting wafers, Scanning electron microscopy, Optical lithography, Lithography

Proceedings Article | 9 July 2015 Paper
Jin Choi, Dong Hyun Lee, Sinjeung Park, SookHyun Lee, Shuichi Tamamushi, In Kyun Shin, Chan Uk Jeon
Proceedings Volume 9658, 96580C (2015) https://doi.org/10.1117/12.2199274
KEYWORDS: Photomasks, Data corrections, Optical proximity correction, Data processing, Data modeling, Scattering, Logic devices, Modulation, Laser scattering, Optical lithography

Proceedings Article | 21 March 2008 Paper
Proceedings Volume 6921, 69212C (2008) https://doi.org/10.1117/12.774485
KEYWORDS: Metals, Lithography, Optical lithography, Near field optics, Aluminum, Near field, Light sources, Objectives, Microscopes, Solids

Showing 5 of 6 publications
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