Dr. Sung M. Hong Profile

Dr. Sung M. Hong

at Aerospace Corp

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Proceedings Article | 27 September 2016 Paper

Percent area coverage through image analysis

Chung Wong, Sung Hong, De-Ling Liu

Proceedings Volume 9952, 995205 (2016) https://doi.org/10.1117/12.2238629

KEYWORDS: Particles, Contamination, Semiconducting wafers, Silicon, Image analysis, Picture Archiving and Communication System, Image processing, Microscopes, Logic, Light scattering

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The notion of percent area coverage (PAC) has been used to characterize surface cleanliness levels in the spacecraft contamination control community. Due to the lack of detailed particle data, PAC has been conventionally calculated by multiplying the particle surface density in predetermined particle size bins by a set of coefficients per MIL-STD-1246C. In deriving the set of coefficients, the surface particle size distribution is assumed to follow a log-normal relation between particle density and particle size, while the cross-sectional area function is given as a combination of regular geometric shapes. For particles with irregular shapes, the cross-sectional area function cannot describe the true particle area and, therefore, may introduce error in the PAC calculation. Other errors may also be introduced by using the lognormal surface particle size distribution function that highly depends on the environmental cleanliness and cleaning process. In this paper, we present PAC measurements from silicon witness wafers that collected fallouts from a fabric material after vibration testing. PAC calculations were performed through analysis of microscope images and compare them to values derived through the MIL-STD-1246C method. Our results showed that the MIL-STD-1246C method does provide a reasonable upper bound to the PAC values determined through image analysis, in particular for PAC values below 0.1.

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