Prof. Svetlana Tatic-Lucic
at Lehigh Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 May 2007 Paper
Gaoshan Jing, Joseph Labukas, Aziz Iqbal, Susan Fueshko Perry, Gregory Ferguson, Svetlana Tatic-Lucic
Proceedings Volume 6592, 65920Y (2007) https://doi.org/10.1117/12.722012
KEYWORDS: Silica, Gold, Self-assembled monolayers, Optical lithography, Printing, Visualization, Silicon, Plasma enhanced chemical vapor deposition, Semiconducting wafers, Microscopes

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