Dr. Telly S. Koffas Profile

Dr. Telly S. Koffas

Marketing Manager at KLA Corp

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Sampling plan optimization and process simulation for CD control

Ulrich Denker, Philip Groeger, Robin Zech, Christoph Ehrlich, Telly Koffas, Samuel Davis

Proceedings Volume 12955, 129552I (2024) https://doi.org/10.1117/12.3010104

KEYWORDS: Semiconducting wafers, Data modeling, Mathematical optimization, Critical dimension metrology, Nonuniform sampling, Computer simulations, Statistical modeling, High volume manufacturing, Zernike polynomials, Overfitting

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Proceedings Article | 22 February 2021 Presentation + Paper

Statistical process optimization method for metrology equipment

Dongsoo Kim, Moran Zaberchik, Chen Li, Honggoo Lee, Chanha Park, Sangho Lee, Dongyoung Lee, Scott Beatty, Jae Park, Ramkumar Karur-Shanmugam, Telly Koffas, Dohwa Lee, Sanghuck Jeon, Dongsub Choi, Efi Megged, Nir BenDavid, Hedvi Spielberg

Proceedings Volume 11611, 1161123 (2021) https://doi.org/10.1117/12.2583638

KEYWORDS: Optimization (mathematics), Metrology, Semiconducting wafers, Statistical methods, Statistical analysis, Time metrology, Overlay metrology, Diffractive optical elements

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Proceedings Article | 19 March 2015 Paper

Lithography overlay control improvement using patterned wafer geometry for sub-22nm technology nodes

Joel Peterson, Gary Rusk, Sathish Veeraraghavan, Kevin Huang, Telly Koffas, Peter Kimani, Jaydeep Sinha

Proceedings Volume 9424, 94240N (2015) https://doi.org/10.1117/12.2086525

KEYWORDS: Semiconducting wafers, Overlay metrology, Lithography, Optical lithography, Scanners, Semiconductors, Photomasks, Dielectrophoresis, Process control, Data modeling

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