Dr. Teus W. Tukker
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 17 June 2024 Presentation + Paper
Proceedings Volume 13023, 130230B (2024) https://doi.org/10.1117/12.3017498
KEYWORDS: Optical design, Mathematical optimization, Lenses, Evolutionary optimization, Objectives, Visualization, Evolutionary algorithms, Tolerancing, Genetic algorithms, Algorithm development

Proceedings Article | 15 August 2023 Presentation + Paper
Tamar Cromwijk, Manashee Adhikary, Sander Konijnenberg, Wim Coene, Teus Tukker, Johannes de Boer, Stefan Witte, Arie den Boef
Proceedings Volume 12618, 126180Y (2023) https://doi.org/10.1117/12.2673637
KEYWORDS: Digital holography, Overlay metrology, Aberration correction, Holography, Microscopy, Calibration, Pupil aberrations, Metrology, Semiconductors, Semiconducting wafers

Proceedings Article | 7 August 2023 Paper
Proceedings Volume 12624, 126240T (2023) https://doi.org/10.1117/12.2675836
KEYWORDS: Mathematical optimization, Evolutionary algorithms, Optical design, Education and training, Lenses, Optics manufacturing, Algorithm development, Reflection, Lithography, Imaging systems, Nonlinear optimization

Proceedings Article | 1 August 2021 Presentation + Paper
Proceedings Volume 11814, 1181402 (2021) https://doi.org/10.1117/12.2593199
KEYWORDS: Evolutionary optimization, Lens design, Machine learning, Optimization (mathematics), Optical design, Optical components, Computer simulations, Optics manufacturing

Proceedings Article | 30 September 2013 Paper
Proceedings Volume 8835, 88350I (2013) https://doi.org/10.1117/12.2024026
KEYWORDS: Diffraction gratings, Waveguides, Diffraction, Light emitting diodes, Sensors, Optical design, Light sources and illumination, Glasses, Light scattering, Ray tracing

Showing 5 of 10 publications
Conference Committee Involvement (2)
Illumination Optics II
7 September 2011 | Marseille, France
Illumination Optics
2 September 2008 | Glasgow, Scotland, United Kingdom
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