Mr. Thanis M. Tridhavee Profile

Thanis M. Tridhavee

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Publications (1)

Proceedings Article | 28 May 2004 Paper

Optimization and apodization of aerial images at high NA in imaging interferometic lithography

Thanis Tridhavee, Balu Santhanam, Steven Brueck

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.533149

KEYWORDS: Image filtering, Apodization, Filtering (signal processing), Lithography, Photoresist materials, Polarization control, Image quality, Nonlinear filtering, Optical filters, Photomasks

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