Microcantilever sensor with embedded piezoresistor has been proposed to measure the surface stress change from biochemical reaction. However, the sensor performance is adversely influenced by the piezoresistive thermal stress and biaxial surface stress loading. A mechanics model of piezoresistive microcantilever subject to surface stress loading is developed in this paper. A double-microcantilever design composed of the top immobilized microcantilever and the bottom sensing microcantilever is also proposed such that the surface stress loading can be converted to a concentrated force loading. The effect of biaxial surface stress can thus be limited to the immobilized microcantilever with the uniaxial strain in the sensing microcantilever. Analyses show that the surface stress sensitivity can be increased by high length ratio and lower thickness ratio of the two cantilevers. More than two orders of magnitude in measurement sensitivity can be achieved and the induced thermal noise can be minimized.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.