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Dr. Uday Mitra
Vice President at Applied Materials Inc
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Author
Publications (2)
Proceedings Article | 16 November 2022 Presentation
EUV extension through materials engineering
Proceedings Volume PC12293, PC1229303 (2022) https://doi.org/10.1117/12.2652966
Proceedings Article | 27 April 2017 Presentation
Impact of materials engineering on edge placement error (Conference Presentation)
Regina Freed, Uday Mitra, Ying Zhang
Proceedings Volume 10149, 1014905 (2017) https://doi.org/10.1117/12.2261107
KEYWORDS: Etching, Error analysis, Transistors, Optical lithography, Immersion lithography, Nanotechnology, Nanostructures, Current controlled current source
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