Mr. Venkatesh Kadbur Prabhakar Rao Profile

Venkatesh Kadbur Prabhakar Rao

at Indian Institute of Science

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Proceedings Article | 7 March 2014 Paper

Electrothermally tunable MEMS filters

A. V. S. S. Prasad, Venkatesh K. P., Navakanta Bhat, Rudra Pratap

Proceedings Volume 8975, 89750P (2014) https://doi.org/10.1117/12.2038822

KEYWORDS: Resonators, Microelectromechanical systems, Actuators, Sensors, Communication engineering, Silicon, 3D modeling, Optical simulations, Structural design, Semiconducting wafers

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MEMS resonators have potential application in the area of frequency selective devices (e.g., gyroscopes, mass sensors, etc.). In this paper, design of electro thermally tunable resonators is presented. SOIMUMPs process is used to fabricate resonators with springs (beams) and a central mass. When voltage is applied, due to joule heating, temperature of the conducting beams goes up. This results in increase of electrical resistance due to mobility degradation. Due to increase in the temperature, springs start softening and therefore the fundamental frequency decreases. So for a given structure, one can modify the original fundamental frequency by changing the applied voltage. Coupled thermal effects result in non-uniform heating. It is observed from measurements and simulations that some parts of the beam become very hot and therefore soften more. Consequently, at higher voltages, the structure (equivalent to a single resonator) behaves like coupled resonators and exhibits peak splitting. In this mode, the given resonator can be used as a band rejection filter. This process is reversible and repeatable. For the designed structure, it is experimentally shown that by varying the voltage from 1 to 16V, the resonant frequency could be changed by 28%.

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