The review on the contact and noncontact scanning probe techniques for nanoscale operations and control are given in this article. The problems of development of these tools are discussed. The examples of surface images for different materials up to the atomic resolution are presented.
On the base of silicon semiconductor and membrane technology was developed and produced a methane-control sensor, which is notable for small energy consumption and high speed. As a functional element was used a catalytic layer, which is a chemically deposited platinum and/or palladium, on the nanostructural silicon. With on the framework of this project, a mechanism of chemical deposition of platinum and palladium on the porous silicon was investigated. On the base of IR-spectrography results, ASM-microscopy of developed structures and thermodynamical analysis was observed the ultimate role of surface protonation of porous silicon in the process of metal deposition. Testing of developed sensor has shown that functional layer on the base of metalized porous silicon is not inferior according to its catalytic properties of platinum or palladium.
On the base of microelectronical and micromechanical technology were designed and developed converters of hydrogen concentration to electrical signals. The devices of controlling concentration of hydrogen in the air were developed. These devices were applied for ensuring fire and explosion security of complex technological teste of missile oxygen-hydrogen engine, developed for cryogenic accelerations block. The sensor block of such device was installed directly on the armor-plate, to which was attached tested engine.
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