Vitalii Lider
at Philipps-Univ Marburg
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2023 Presentation + Paper
Proceedings Volume 12421, 1242103 (2023) https://doi.org/10.1117/12.2648960
KEYWORDS: Gallium nitride, Aluminum, Silicon carbide, Reflection, Atomic force microscopy, Surface roughness

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