We describe simultaneous determination of surface height profile and material distribution in the surface by imaging polarization detection. Starting from the single-beam case, the measurement principle based on the Stokes-Mueller formalism is deduced. This algorithm implies waviness detection of smooth as well as of rough surfaces. The basic concept of an imaging ellipsometer and its system configuration are discussed in the Stokes-Mueller formalism. Measuring the local slopes of the surface applying Fresnel's equations, the height image is deduced. Furthermore the imaging ellipsometer delivers the local complex refractive index from which the image of material distribution can be derived by a look-up table.
KEYWORDS: Modulation, Semiconductor lasers, Sensors, Frequency modulation, Linear filtering, Phase shift keying, Interferometry, Interferometers, Signal detection, Signal processing
We present a coherent-optical measurement procedure for contactless distance sensing. The radiation source is a laser diode whose optical wavelength is randomly modulated about 3...12 pm (rms value) by noise modulation of the injection current at a bandwidth of up to 100 kHz. An interferometer serves as a coherent detector. The average beat frequency of the photodetector output is a measure for the absolute distance to the object. Combining the natural phase noise of the laser diode with an additional technical frequency-modulation process, sensitivity can be drastically improved, particularly in the short distance range. Due to the technical current modulation the coherent detection can be used well beyond the coherence length of the laser diode. For small target ranges the absolute distance resolution increases. This measurement behavior is advantageous for approach/docking applications, for example. The measurement procedure was verified experimentally in a distance range up to 4 m.
KEYWORDS: Semiconductor lasers, Modulation, Interferometers, Signal detection, Sensors, Photodetectors, Interferometry, Signal processing, Frequency modulation, Linear filtering
Theory, experimental performance, and application of the noise-modulated interferometer are presented. This novel two-beam interferometer applies (1st) a laser diode source that is stochastically modulated in its frequency and (2nd) a common photodetector in the output arm followed by an averaging frequency counter. It is demonstrated that homodyne detecting of the two interferometer beams and counting the averaged beat frequency can be understood as a correlation process. By applying Horton's Anticorrelation' function to the signal processing channel of the noise-modulated interferometer, the range R <EQ 2 m of reflecting target is determined with high precision.
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