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Dr. William D. Sawyer
Senior Member of Technical Staff at Charles Stark Draper Lab Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 23 January 2006 Paper
Silicon on insulator inertial MEMS device processing
William Sawyer, Mert Prince
Proceedings Volume 6113, 611302 (2006) https://doi.org/10.1117/12.657138
KEYWORDS: Semiconducting wafers, Silicon, Microelectromechanical systems, Etching, Manufacturing, Glasses, Wafer bonding, Gyroscopes, Surface micromachining, Sensors
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